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TNO and ASML join forces to scale European photonic chip manufacturing

27 d ago

TNO and ASML have announced a partnership to scale European photonic chip manufacturing, aiming to strengthen the semiconductor ecosystem. The collaboration will leverage TNO’s new Photonic Chip Pilot Line, currently under construction at the High Tech Campus in Eindhoven, the Netherlands. The pilot line will enable high-volume manufacturing of photonic chips through lithography, process control, and metrology solutions, with ASML providing DUV and i-line scanners for the facility. This shared R&D environment will support technical workshops, joint innovation, and customer demonstrations. Once operational, the fab will produce indium phosphide (InP) photonic chips at a 6-inch wafer scale. The research ecosystem includes the Photonic Integration Technology Centre (PITC), founded by TNO, Eindhoven University of Technology, and the University of Twente, to translate designs into applications. The partnership aims to improve operational performance and maintain Europe’s leadership in integrated photonics. Arnaud de Jong, managing director of TNO High Tech Industry, stated: “This partnership with ASML reinforces our commitment to building European unicorns in the semiconductor landscape. By combining our R&D capabilities with world-class equipment, we are creating a unique pilot-line environment that will benefit the entire industry.” Stanislas Baron, senior VP at ASML, added: “Scaling photonic chip technology requires a seamless transition from cutting-edge research to high-volume manufacturing. By integrating our lithography systems into TNO’s pilot line, we are bridging that gap. This collaboration gives us the ideal environment to optimize our processes for integrated photonics, ultimately accelerating the time-to-market for this transformative technology.”